Abstract

IMEC has installed together with Royal HaskoningDHV Greenfab a Crystalactor™ pilot unit to verify applicability for the treatment of HF semiconductor wastewater.

The volume of HF-containing wastewater originating from the semiconductor industries is continuously increasing. The two major sources are the wet cleaning tools and wet PFC scrubbers.

The Crystalactor™ is Royal HaskoningDHV’s clean technology for removal and recovery of heavy metals, phosphates, hardness and fluoride from water. Since the seventies, this proven technology is used in many industry branches. Current applications in the semiconductor industry are now limited to Japan, where Organo Corporation sells “EcoCrysta” under licence from Royal HaskoningDHV. The amount of units in operation, however, will increase soon when several units that currently being engineered are started up.

To verify the benefits of the Crystalactor™ technology for the sustainable treatment of HFcontaining semiconductor wastewater, IMEC and Royal HaskoningDHV have set up a collaboration.

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